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Micromech. , Vol. 12: pp. 204–210, 2002. 47. S. Kurth, K. Hiller, N. Zichner, J. Mehner, T. Iwert, S. Biehl, W. Dotzel and T. Gessner, A micromachined pressure gauge for the vacuum range based on damping of a resonator, Proc. SPIE Vol. 4559: pp. 103–111, 2001. 13 48. K. E. Wojciechowski, B. E. Boser and A. P. Pisano, A MEMS resonant strain sensor, Proc. Seventeenth IEEE Annual International Conference on Micro Electro Mechanical Systems, Maastrict, Netherlands: pp. 841–845, 25-29th January 2004.

A. Abdelmoneum, M. U. Demirci and C. -C. Nguyen, Stemless wine-glass-mode disk micromechanical resonators, Proc. Sixteenth IEEE Annual International Conference on Micro Electro Mechanical Systems, Kyoto, Japan: pp. 698–701, 1923rd January 2003. 54. J. Wang, J. E. Butler, T. Feygelson and C. -C. 51-GHz nanocrystalline diamond micromechanical disk resonator with material-mismatched isolating support, Proc. Seventeenth IEEE Annual International Conference on Micro Electro Mechanical Systems, Maastrict, Netherlands: pp.

555–564, 1983. 38. R. Johnson and A. Barr, Acoustic and internal damping in uniform beams, J. Mech. Eng. , Vol. 11 (2), pp. 117–127, 1969. 39. M. Andrews, I. Harris, G. Turner, A comparison of squeeze-film theory with measurements on a microstructure, Sensors and Actuators A, Vol. 26: pp. 79–87, 1993. 40. H. Hosaka, K. Itao and S. Kuroda, Damping characteristics of beam shaped micro-oscillators, Sensors and Actuators A, 49: pp. 87–95, 1995. 41. M. Andrews, I. Harris and G. Turner, A comparison of squeeze film theory damping with measuremnts on a microstructure, Sensors and Actuators A, 36: pp.

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